L’ABLATION LASER POUR L’ELABORATION DES COUCHES MINCES DE CARBONE HYDROGENE

Abstract

The effect of CH4 pressure and substrate temperature on the synthesis of hydrogenatedcarbon thin films by pulsed laser deposition is investigated. Thus, two sets of samples were elaborated. For the first set hydrogenated amorphous carbon thin films were elaborated ata fixed condition of laser fluence and substrate temperature and varied CH4 pressure from 0.1 mbar to 1 mbar. For the second set of samples, the CH4 pressure was fixed at 0.3 mbar and the substrate temperature was varied from room temperature to 600°C. The ERDA analysis revealed the highest amount of hydrogen in the film elaborated at room temperature and 0.3 mbar of CH4. Furthermore, this amount decreases along with the increase of the substrate temperature. The Raman spectroscopy shownthe structural changed induced by the substrate temperature increases. Indeed, the films evolvedfrom hydrogenated amorphous carbon to hydrogenated graphene.